Plasma is matter heated beyond its gaseous state, heated to a temperature so high that atoms are stripped of at least one electron in their outer shells, so that what remains are positive ions in a sea of free electrons. That is, as the temperature increases, the atoms become more energetic and transform matter in the sequence: solid, liquid, gas, and finaly plasma which justifies the title, "fourth state of matter". Fluorescent lights contains plasmas. Aside from those, we do not often encounter plasmas in everyday life. Outside the earth in the ionosphere or outer spapce, however, almost everything is in the plasma state. Some examples are Aurora borealis, Fluorescent lamp, Fires and TVs. The plasma ion engine is used for the flight of the space probe "Hayabusa".On the other hand, Plasma processing is the most widely used chemical process in microelectronic industry for thin film deposition and etching. Its application expands to surface modification, flat panel display fabrication, solar cell, plasma spary and plasma microdischarge and many other growing areas. The studies such as sterilization and sterilization, the growth stimulation of the plant are pushed forward recently. It is highly advanced the imminent product of all of you by this plasma process technology.