Welcome to Plasma Electronics Laboratory

"The Plasma" which is a fourth matter state becomes the indispensable technique in advanced electronic industry. "Plasma" performs the super minute processing with nanometer size which can make Large scale integrated circuit (LSI) mounted in information electric products such as mobile phone and computer. In our laboratory, we are performing a study on development of a plasma processing apparatus with low-energy consumption based on environmental conservation supporting those techniques and/or electronic material functional film preparation using the plasma.