SAGA UNIVERSITY
POWER ELECTRONICS LABORATORY (Prof. Kasu)

Diamond Crystal Growth System (Microwave plasma CVD system)

We grow high-purity diamond crystal in order to make diamond power transistors.

Microwave power	5 kW
Microwave frequency	2.45 GHz
Sources	CH4 (methane) H2 (hydrogen)
Growth rate	0.2~5 micron per hour

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Wide gap semiconductor growth system (Molecular beam epitaxy)

We grow nitride and silicon carbide thin films.

High-temperature device measurement system

We measure device and semiconductor samples at 1000 ^oC.